【研究成果】2013年

研究成果64

3D microfabrication of single-wall carbon nanotube/polymer composites by two-photon polymerization lithography
Shota Ushiba, Satoru Shoji, Kyoko Masui, Preeya Kuray, Junichiro Kono, Satoshi Kawata
CARBON 59 (2013) 283

We have demonstrated a method for 3D micro/nano-fabrication of SWCNT/polymer composites by the two-photon polymerization (TPP) lithography. We showed that SWCNTs were fully and uniformly embedded into micro/nano-structures. In addition, we found that SWCNTs were aligned along the nanowire axis. Furthermore, the spatial resolution for fabrication was as small as 200 nm in lateral direction, which is much higher than that reported for other fabrication processes for the 3D structural composites. The resultant structures would exhibit higher mechanical and electrical properties, especially in a nowire shaped composites, due to the self-alignment of SWCNTs inside the wire. These results indicate that our method is promising for realizing SWCNT/polymer composite-based 3D MEMS and NEMS.