【研究成果】2014年

研究成果70

Laser nanofabrication in photoresists and azopolymers
Zouheir Sekkat and Satoshi Kawata
Laser Photonics Rev. 8, No. 1, 1–26 (2014) / DOI 10.1002/lpor.201200081
Related news at RISOU, Osaka University

Recent progress in the field of single- and two-photon nanofabrication, both 2- and 3-dimensional, in photopolymerizable resins and in films of photoisomerizable azopolymers are reviewed. The basic processes as well as technological advances and applications of nanofabrication by light are discussed. Recent advances and achievements in polymer photomechanics and light-activated molecular movement in azopolymers are also reviewed.

Top) Scanning electron microscopic (SEM) image of a microbull sculpture produced by raster scanning (left) and surface profile scanning (right). For the latter, only the crust was defined by the two-photon process, the inside was solidified by illumination under a mercury lamp. In this particular structure, the two-photon scanning time was reduced by 90% due to the use of surface profile scanning and subsequent solidification under a mercury lamp. Nanofabrication took 13 min. (Bottom) schematics of (a) raster, and (b) surface profile scanning.
Scanning electron microscope images of (a) selfstanding empty cubic structures (height∼4.6 μm) connected in pairs and (b) a silver-coated polymer structure composed of a cube (2 μm in size) holding up a spring (inner diameter 700 nm). The structures are made by a two-photon-induced photopolymerization technique combined with electroless plating.